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Mark Heiden

Nanofabrication Facility Manager

Contact Information
Staff
(951) 827-2551

Nanofabrication Facility Manager

Positions Held:

  • 8/97-11/02 
    General Manager, Hi Q Engineering, Ontario, CA
  • 8/92-7/97 
    Product Manager, MTI Technology Corp, Anaheim, CA
  • 1/88-8/92 
    Special Projects Manager, Hi Q Engineering, Ontario, CA
  • 8/82-1/88 
    Senior Production Manager, General Precision Ind., Irvine, CA
  • 7/76-8/82 
    Technical Support Manager, Statek Corp., Orange, CA

Research Interests:

Nanoscale and MEMS device fabrication, Laboratory monitoring and management systems.

Professional Experience:

Over 25 years experience in all aspects of the quartz crystal device and MEMS sensor research and development, design/test and manufacturing including:

  • Facilities design, construction and maintenance
  • Photolithography
  • Quality assurance and process control
  • Equipment refurbish, design modification and maintenance
  • Clean room design, construction and maintenance
  • Process engineering/development
  • Wafer grinding/polishing
  • E-beam metallization
  • Thermal metallization
  • UV/Ozone cleaning
  • Chemical etching
  • Metrology


Email: mheiden@engr.ucr.edu
Extension: 2551

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